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System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation
Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and a...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713045/ https://www.ncbi.nlm.nih.gov/pubmed/29156560 http://dx.doi.org/10.3390/s17112663 |