Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The...

Descripción completa

Detalles Bibliográficos
Autores principales: Tan, Xinran, Zhu, Fan, Wang, Chao, Yu, Yang, Shi, Jian, Qi, Xue, Yuan, Feng, Tan, Jiubin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713096/
https://www.ncbi.nlm.nih.gov/pubmed/29156595
http://dx.doi.org/10.3390/s17112672

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713096/
https://www.ncbi.nlm.nih.gov/pubmed/29156595
http://dx.doi.org/10.3390/s17112672

Ejemplares similares