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Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The...

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Detalles Bibliográficos
Autores principales:	Tan, Xinran, Zhu, Fan, Wang, Chao, Yu, Yang, Shi, Jian, Qi, Xue, Yuan, Feng, Tan, Jiubin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713096/ https://www.ncbi.nlm.nih.gov/pubmed/29156595 http://dx.doi.org/10.3390/s17112672

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