Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si(3)N(4) Bimorph Microcantilevers for Static Mode Sensing

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The...

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Detalles Bibliográficos
Autores principales: Kang, Seok-Won, Fragala, Joe, Kim, Su-Ho, Banerjee, Debjyoti
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713188/
https://www.ncbi.nlm.nih.gov/pubmed/29104265
http://dx.doi.org/10.3390/s17112510

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713188/
https://www.ncbi.nlm.nih.gov/pubmed/29104265
http://dx.doi.org/10.3390/s17112510

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