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Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si(3)N(4) Bimorph Microcantilevers for Static Mode Sensing
This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5713188/ https://www.ncbi.nlm.nih.gov/pubmed/29104265 http://dx.doi.org/10.3390/s17112510 |