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Selectable phase formation in VAlN thin films by controlling Al(+) subplantation depth
We report on a thin film synthesis technique which allows for unprecedented control over the crystalline phase formation in metastable transition metal nitride based layers. For the model material system of V(0.26)Al(0.74)N, a complete transition from hexagonal to supersaturated cubic structure is a...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5727504/ https://www.ncbi.nlm.nih.gov/pubmed/29235523 http://dx.doi.org/10.1038/s41598-017-17846-5 |