Electron beam induced removal of PMMA layer used for graphene transfer

We demonstrate the development of an effective technique to remove the poly methyl methacrylate (PMMA) layer used for transferring graphene synthesized by a chemical vapor deposition (CVD). This was achieved utilizing electron-beam bombardment and following developing processes, prior to the use of...

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Detalles Bibliográficos
Autores principales: Son, B. H., Kim, H. S., Jeong, H., Park, Ji-Yong, Lee, Soonil, Ahn, Y. H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5741774/
https://www.ncbi.nlm.nih.gov/pubmed/29273714
http://dx.doi.org/10.1038/s41598-017-18444-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5741774/
https://www.ncbi.nlm.nih.gov/pubmed/29273714
http://dx.doi.org/10.1038/s41598-017-18444-1

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