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Electron beam induced removal of PMMA layer used for graphene transfer
We demonstrate the development of an effective technique to remove the poly methyl methacrylate (PMMA) layer used for transferring graphene synthesized by a chemical vapor deposition (CVD). This was achieved utilizing electron-beam bombardment and following developing processes, prior to the use of...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5741774/ https://www.ncbi.nlm.nih.gov/pubmed/29273714 http://dx.doi.org/10.1038/s41598-017-18444-1 |
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author | Son, B. H. Kim, H. S. Jeong, H. Park, Ji-Yong Lee, Soonil Ahn, Y. H. |
author_facet | Son, B. H. Kim, H. S. Jeong, H. Park, Ji-Yong Lee, Soonil Ahn, Y. H. |
author_sort | Son, B. H. |
collection | PubMed |
description | We demonstrate the development of an effective technique to remove the poly methyl methacrylate (PMMA) layer used for transferring graphene synthesized by a chemical vapor deposition (CVD). This was achieved utilizing electron-beam bombardment and following developing processes, prior to the use of conventional organic solvents. Field-effect transistors were fabricated on the transferred graphene in order to explore their Dirac points and carrier motilities in the ambient condition - the results were then compared with those from the conventional wet chemical treatment. It was found that the Dirac points were located close to the zero gate bias when compared to those from the acetone and the acetic acid treatments. Most significantly, the field-effect mobility reached as high as 6770 cm(2)/Vs and 7350 cm(2)/Vs on average for holes and electrons, respectively, which is more than seven times improvement in comparison to conventional acetone treatments for CVD-grown graphene devices. |
format | Online Article Text |
id | pubmed-5741774 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | Nature Publishing Group UK |
record_format | MEDLINE/PubMed |
spelling | pubmed-57417742018-01-03 Electron beam induced removal of PMMA layer used for graphene transfer Son, B. H. Kim, H. S. Jeong, H. Park, Ji-Yong Lee, Soonil Ahn, Y. H. Sci Rep Article We demonstrate the development of an effective technique to remove the poly methyl methacrylate (PMMA) layer used for transferring graphene synthesized by a chemical vapor deposition (CVD). This was achieved utilizing electron-beam bombardment and following developing processes, prior to the use of conventional organic solvents. Field-effect transistors were fabricated on the transferred graphene in order to explore their Dirac points and carrier motilities in the ambient condition - the results were then compared with those from the conventional wet chemical treatment. It was found that the Dirac points were located close to the zero gate bias when compared to those from the acetone and the acetic acid treatments. Most significantly, the field-effect mobility reached as high as 6770 cm(2)/Vs and 7350 cm(2)/Vs on average for holes and electrons, respectively, which is more than seven times improvement in comparison to conventional acetone treatments for CVD-grown graphene devices. Nature Publishing Group UK 2017-12-22 /pmc/articles/PMC5741774/ /pubmed/29273714 http://dx.doi.org/10.1038/s41598-017-18444-1 Text en © The Author(s) 2017 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. |
spellingShingle | Article Son, B. H. Kim, H. S. Jeong, H. Park, Ji-Yong Lee, Soonil Ahn, Y. H. Electron beam induced removal of PMMA layer used for graphene transfer |
title | Electron beam induced removal of PMMA layer used for graphene transfer |
title_full | Electron beam induced removal of PMMA layer used for graphene transfer |
title_fullStr | Electron beam induced removal of PMMA layer used for graphene transfer |
title_full_unstemmed | Electron beam induced removal of PMMA layer used for graphene transfer |
title_short | Electron beam induced removal of PMMA layer used for graphene transfer |
title_sort | electron beam induced removal of pmma layer used for graphene transfer |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5741774/ https://www.ncbi.nlm.nih.gov/pubmed/29273714 http://dx.doi.org/10.1038/s41598-017-18444-1 |
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