Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS

A highly efficient and reproducible cleaning procedure of piezoelectric substrates is essential in surface acoustic waves (SAW) technology to fabricate high-quality SAW devices, especially for new applications such SAW sensors wherein new materials for piezoelectric substrates and interdigital trans...

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Detalles Bibliográficos
Autores principales: Brachmann, Erik, Seifert, Marietta, Oswald, Steffen, Menzel, Siegfried B., Gemming, Thomas
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744308/
https://www.ncbi.nlm.nih.gov/pubmed/29189721
http://dx.doi.org/10.3390/ma10121373

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744308/
https://www.ncbi.nlm.nih.gov/pubmed/29189721
http://dx.doi.org/10.3390/ma10121373

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