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Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process
This article presents an experimental investigation on ductile-mode micro-milling of monocrystalline silicon using polycrystalline diamond (PCD) end mills. Experimental results indicate that the irregular fluctuation of cutting force always induces machined surface failure, even in ductile mode. The...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744359/ https://www.ncbi.nlm.nih.gov/pubmed/29236086 http://dx.doi.org/10.3390/ma10121424 |