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Multiscale Analyses of Surface Failure Mechanism of Single-Crystal Silicon during Micro-Milling Process

This article presents an experimental investigation on ductile-mode micro-milling of monocrystalline silicon using polycrystalline diamond (PCD) end mills. Experimental results indicate that the irregular fluctuation of cutting force always induces machined surface failure, even in ductile mode. The...

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Detalles Bibliográficos
Autores principales:	Bai, Jinxuan, Bai, Qingshun, Tong, Zhen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2017
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5744359/ https://www.ncbi.nlm.nih.gov/pubmed/29236086 http://dx.doi.org/10.3390/ma10121424

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