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Transparent and Flexible Capacitors with an Ultrathin Structure by Using Graphene as Bottom Electrodes

Ultrathin, transparent and flexible capacitors using graphene as the bottom electrodes were directly fabricated on polyethylene naphthalate (PEN) substrates. ZrO(2) dielectric films were deposited on the treated surface of graphene by atomic layer deposition (ALD). The deposition process did not int...

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Detalles Bibliográficos
Autores principales: Guo, Tao, Zhang, Guozhen, Su, Xi, Zhang, Heng, Wan, Jiaxian, Chen, Xue, Wu, Hao, Liu, Chang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5746908/
https://www.ncbi.nlm.nih.gov/pubmed/29182551
http://dx.doi.org/10.3390/nano7120418