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Transparent and Flexible Capacitors with an Ultrathin Structure by Using Graphene as Bottom Electrodes
Ultrathin, transparent and flexible capacitors using graphene as the bottom electrodes were directly fabricated on polyethylene naphthalate (PEN) substrates. ZrO(2) dielectric films were deposited on the treated surface of graphene by atomic layer deposition (ALD). The deposition process did not int...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5746908/ https://www.ncbi.nlm.nih.gov/pubmed/29182551 http://dx.doi.org/10.3390/nano7120418 |