Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

In this paper, an alumina-zirconia (Al(2)O(3)-ZrO(2)) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al(2)O(3)/ZrO(2) in nanolaminates: when the content of Al(2...

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Detalles Bibliográficos
Autores principales: Peng, Junbiao, Wei, Jinglin, Zhu, Zhennan, Ning, Honglong, Cai, Wei, Lu, Kuankuan, Yao, Rihui, Tao, Hong, Zheng, Yanqiong, Lu, Xubing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5746909/
https://www.ncbi.nlm.nih.gov/pubmed/29186081
http://dx.doi.org/10.3390/nano7120419

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5746909/
https://www.ncbi.nlm.nih.gov/pubmed/29186081
http://dx.doi.org/10.3390/nano7120419

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