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Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating
In this paper, an alumina-zirconia (Al(2)O(3)-ZrO(2)) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al(2)O(3)/ZrO(2) in nanolaminates: when the content of Al(2...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5746909/ https://www.ncbi.nlm.nih.gov/pubmed/29186081 http://dx.doi.org/10.3390/nano7120419 |