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Effect of Oxygen Sputter Pressure on the Structural, Morphological and Optical Properties of ZnO Thin Films for Gas Sensing Application
ZnO thin films were prepared on glass substrates at low (5 × 10(−4) mbar) and high (3 × 10(−3) mbar) sputter pressure using dc reactive magnetron sputtering. The structural, morphological, compositional and optical properties of the thin films were investigated. XRD patterns of both films confirmed...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer US
2017
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5747580/ https://www.ncbi.nlm.nih.gov/pubmed/29354023 http://dx.doi.org/10.1007/s11220-017-0184-5 |