High-Speed Focus Inspection System Using a Position-Sensitive Detector

Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution fo...

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Detalles Bibliográficos
Autores principales: Cao, Binh Xuan, Hoang, Phuong Le, Ahn, Sanghoon, Kang, Heeshin, Kim, Jengo, Noh, Jiwhan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5751675/
https://www.ncbi.nlm.nih.gov/pubmed/29292722
http://dx.doi.org/10.3390/s17122842

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5751675/
https://www.ncbi.nlm.nih.gov/pubmed/29292722
http://dx.doi.org/10.3390/s17122842

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