Cargando…
High-Speed Focus Inspection System Using a Position-Sensitive Detector
Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution fo...
Autores principales: | , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5751675/ https://www.ncbi.nlm.nih.gov/pubmed/29292722 http://dx.doi.org/10.3390/s17122842 |
_version_ | 1783289998753136640 |
---|---|
author | Cao, Binh Xuan Hoang, Phuong Le Ahn, Sanghoon Kang, Heeshin Kim, Jengo Noh, Jiwhan |
author_facet | Cao, Binh Xuan Hoang, Phuong Le Ahn, Sanghoon Kang, Heeshin Kim, Jengo Noh, Jiwhan |
author_sort | Cao, Binh Xuan |
collection | PubMed |
description | Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips. |
format | Online Article Text |
id | pubmed-5751675 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-57516752018-01-10 High-Speed Focus Inspection System Using a Position-Sensitive Detector Cao, Binh Xuan Hoang, Phuong Le Ahn, Sanghoon Kang, Heeshin Kim, Jengo Noh, Jiwhan Sensors (Basel) Article Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips. MDPI 2017-12-08 /pmc/articles/PMC5751675/ /pubmed/29292722 http://dx.doi.org/10.3390/s17122842 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Cao, Binh Xuan Hoang, Phuong Le Ahn, Sanghoon Kang, Heeshin Kim, Jengo Noh, Jiwhan High-Speed Focus Inspection System Using a Position-Sensitive Detector |
title | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
title_full | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
title_fullStr | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
title_full_unstemmed | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
title_short | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
title_sort | high-speed focus inspection system using a position-sensitive detector |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5751675/ https://www.ncbi.nlm.nih.gov/pubmed/29292722 http://dx.doi.org/10.3390/s17122842 |
work_keys_str_mv | AT caobinhxuan highspeedfocusinspectionsystemusingapositionsensitivedetector AT hoangphuongle highspeedfocusinspectionsystemusingapositionsensitivedetector AT ahnsanghoon highspeedfocusinspectionsystemusingapositionsensitivedetector AT kangheeshin highspeedfocusinspectionsystemusingapositionsensitivedetector AT kimjengo highspeedfocusinspectionsystemusingapositionsensitivedetector AT nohjiwhan highspeedfocusinspectionsystemusingapositionsensitivedetector |