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High-Speed Focus Inspection System Using a Position-Sensitive Detector

Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution fo...

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Detalles Bibliográficos
Autores principales: Cao, Binh Xuan, Hoang, Phuong Le, Ahn, Sanghoon, Kang, Heeshin, Kim, Jengo, Noh, Jiwhan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5751675/
https://www.ncbi.nlm.nih.gov/pubmed/29292722
http://dx.doi.org/10.3390/s17122842
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author Cao, Binh Xuan
Hoang, Phuong Le
Ahn, Sanghoon
Kang, Heeshin
Kim, Jengo
Noh, Jiwhan
author_facet Cao, Binh Xuan
Hoang, Phuong Le
Ahn, Sanghoon
Kang, Heeshin
Kim, Jengo
Noh, Jiwhan
author_sort Cao, Binh Xuan
collection PubMed
description Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.
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spelling pubmed-57516752018-01-10 High-Speed Focus Inspection System Using a Position-Sensitive Detector Cao, Binh Xuan Hoang, Phuong Le Ahn, Sanghoon Kang, Heeshin Kim, Jengo Noh, Jiwhan Sensors (Basel) Article Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips. MDPI 2017-12-08 /pmc/articles/PMC5751675/ /pubmed/29292722 http://dx.doi.org/10.3390/s17122842 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Cao, Binh Xuan
Hoang, Phuong Le
Ahn, Sanghoon
Kang, Heeshin
Kim, Jengo
Noh, Jiwhan
High-Speed Focus Inspection System Using a Position-Sensitive Detector
title High-Speed Focus Inspection System Using a Position-Sensitive Detector
title_full High-Speed Focus Inspection System Using a Position-Sensitive Detector
title_fullStr High-Speed Focus Inspection System Using a Position-Sensitive Detector
title_full_unstemmed High-Speed Focus Inspection System Using a Position-Sensitive Detector
title_short High-Speed Focus Inspection System Using a Position-Sensitive Detector
title_sort high-speed focus inspection system using a position-sensitive detector
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5751675/
https://www.ncbi.nlm.nih.gov/pubmed/29292722
http://dx.doi.org/10.3390/s17122842
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