Cargando…
Nitrogen implantation with a scanning electron microscope
Established techniques for ion implantation rely on technically advanced and costly machines like particle accelerators that only few research groups possess. We report here about a new and surprisingly simple ion implantation method that is based upon a widespread laboratory instrument: The scannin...
| Autores principales: | , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5758827/ https://www.ncbi.nlm.nih.gov/pubmed/29311583 http://dx.doi.org/10.1038/s41598-017-18373-z |