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Nitrogen implantation with a scanning electron microscope

Established techniques for ion implantation rely on technically advanced and costly machines like particle accelerators that only few research groups possess. We report here about a new and surprisingly simple ion implantation method that is based upon a widespread laboratory instrument: The scannin...

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Detalles Bibliográficos
Autores principales:	Becker, S., Raatz, N., Jankuhn, St., John, R., Meijer, J.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5758827/ https://www.ncbi.nlm.nih.gov/pubmed/29311583 http://dx.doi.org/10.1038/s41598-017-18373-z

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