An experimental approach for real time mass spectrometric CVD gas phase investigations

This is a report on the first setup of a recently developed, extremely sensitive and very fast 3D quadrupole ion trap mass spectrometer inline in a metalorganic vapour phase epitaxy (MOVPE) system. This setup was developed ultimately for the decomposition- and the interaction analysis of various est...

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Detalles Bibliográficos
Autores principales: Nattermann, L., Maßmeyer, O., Sterzer, E., Derpmann, V., Chung, H. Y., Stolz, W., Volz, K.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5762754/
https://www.ncbi.nlm.nih.gov/pubmed/29321588
http://dx.doi.org/10.1038/s41598-017-18662-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5762754/
https://www.ncbi.nlm.nih.gov/pubmed/29321588
http://dx.doi.org/10.1038/s41598-017-18662-7

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