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Tailoring Lattice Strain and Ferroelectric Polarization of Epitaxial BaTiO(3) Thin Films on Si(001)
Ferroelectric BaTiO(3) films with large polarization have been integrated with Si(001) by pulsed laser deposition. High quality c-oriented epitaxial films are obtained in a substrate temperature range of about 300 °C wide. The deposition temperature critically affects the growth kinetics and thermod...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5765027/ https://www.ncbi.nlm.nih.gov/pubmed/29323164 http://dx.doi.org/10.1038/s41598-017-18842-5 |