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Response under low-energy electron irradiation of a thin film of a potential copper precursor for focused electron beam induced deposition (FEBID)

Background: Focused electron beam induced deposition (FEBID) allows for the deposition of free standing material within nanometre sizes. The improvement of the technique needs a combination of new precursors and optimized irradiation strategies to achieve a controlled fragmentation of the precursor...

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Detalles Bibliográficos
Autores principales:	Sala, Leo, Szymańska, Iwona B, Dablemont, Céline, Lafosse, Anne, Amiaud, Lionel
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2018
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5769079/ https://www.ncbi.nlm.nih.gov/pubmed/29379701 http://dx.doi.org/10.3762/bjnano.9.8

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