Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

This review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical...

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Detalles Bibliográficos
Autores principales: Jasulaneca, Liga, Kosmaca, Jelena, Meija, Raimonds, Andzane, Jana, Erts, Donats
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2018
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5789396/
https://www.ncbi.nlm.nih.gov/pubmed/29441272
http://dx.doi.org/10.3762/bjnano.9.29

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5789396/
https://www.ncbi.nlm.nih.gov/pubmed/29441272
http://dx.doi.org/10.3762/bjnano.9.29

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