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Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions
This review summarizes relevant research in the field of electrostatically actuated nanobeam-based nanoelectromechanical (NEM) switches. The main switch architectures and structural elements are briefly described and compared. Investigation methods that allow for exploring coupled electromechanical...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5789396/ https://www.ncbi.nlm.nih.gov/pubmed/29441272 http://dx.doi.org/10.3762/bjnano.9.29 |