Damage-free plasma etching of porous organo-silicate low-k using micro-capillary condensation above −50 °C

The micro-capillary condensation of a new high boiling point organic reagent (HBPO), is studied in a periodic mesoporous oxide (PMO) with ∼34 % porosity and k-value ∼2.3. At a partial pressure of 3 mT, the onset of micro-capillary condensation occurs around +20 °C and the low-k matrix is filled at −...

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Detalles Bibliográficos
Autores principales: Chanson, R., Zhang, L., Naumov, S., Mankelevich, Yu. A., Tillocher, T., Lefaucheux, P., Dussart, R., Gendt, S. De, Marneffe, J.-F. de
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5789876/
https://www.ncbi.nlm.nih.gov/pubmed/29382890
http://dx.doi.org/10.1038/s41598-018-20099-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5789876/
https://www.ncbi.nlm.nih.gov/pubmed/29382890
http://dx.doi.org/10.1038/s41598-018-20099-5

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