Quadrilateral Micro-Hole Array Machining on Invar Thin Film: Wet Etching and Electrochemical Fusion Machining

Ultra-precision products which contain a micro-hole array have recently shown remarkable demand growth in many fields, especially in the semiconductor and display industries. Photoresist etching and electrochemical machining are widely known as precision methods for machining micro-holes with no res...

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Detalles Bibliográficos
Autores principales: Choi, Woong-Kirl, Kim, Seong-Hyun, Choi, Seung-Geon, Lee, Eun-Sang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793658/
https://www.ncbi.nlm.nih.gov/pubmed/29351235
http://dx.doi.org/10.3390/ma11010160

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793658/
https://www.ncbi.nlm.nih.gov/pubmed/29351235
http://dx.doi.org/10.3390/ma11010160

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