Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer

The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon of closed-loop micro-accelerometers. The glass substrate underneath the sensitive silicon structure underwent a polarizing process when the DC bias voltage was applied. The slow polarizin...

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Detalles Bibliográficos
Autores principales: Zhou, Wu, He, Jiangbo, Yu, Huijun, Peng, Bei, He, Xiaoping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793661/
https://www.ncbi.nlm.nih.gov/pubmed/29361685
http://dx.doi.org/10.3390/ma11010163

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5793661/
https://www.ncbi.nlm.nih.gov/pubmed/29361685
http://dx.doi.org/10.3390/ma11010163

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