Integrated Temperature and Hydrogen Sensors with MEMS Technology

In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, whi...

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Detalles Bibliográficos
Autores principales: Jiang, Hongchuan, Huang, Min, Yu, Yibing, Tian, Xiaoyu, Zhao, Xiaohui, Zhang, Wanli, Zhang, Jianfeng, Huang, Yifan, Yu, Kun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795469/
https://www.ncbi.nlm.nih.gov/pubmed/29301220
http://dx.doi.org/10.3390/s18010094

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795469/
https://www.ncbi.nlm.nih.gov/pubmed/29301220
http://dx.doi.org/10.3390/s18010094

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