A High Sensitivity Electric Field Microsensor Based on Torsional Resonance

This paper proposes a high sensitivity electric field microsensor (EFM) based on torsional resonance. The proposed microsensor adopts torsional shutter, which is composed of shielding electrodes and torsional beams. The movable shielding electrodes and the fixed sensing electrodes are fabricated on...

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Detalles Bibliográficos
Autores principales: Chu, Zhaozhi, Peng, Chunrong, Ren, Ren, Ling, Biyun, Zhang, Zhouwei, Lei, Hucheng, Xia, Shanhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795550/
https://www.ncbi.nlm.nih.gov/pubmed/29351210
http://dx.doi.org/10.3390/s18010286

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795550/
https://www.ncbi.nlm.nih.gov/pubmed/29351210
http://dx.doi.org/10.3390/s18010286

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