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UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)O...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795609/ https://www.ncbi.nlm.nih.gov/pubmed/29278393 http://dx.doi.org/10.3390/s18010050 |