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UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)O...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2017
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795609/ https://www.ncbi.nlm.nih.gov/pubmed/29278393 http://dx.doi.org/10.3390/s18010050 |
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author | Huang, Jinyu Du, Yu Wang, Quan Zhang, Hao Geng, Youfu Li, Xuejin Tian, Xiaoqing |
author_facet | Huang, Jinyu Du, Yu Wang, Quan Zhang, Hao Geng, Youfu Li, Xuejin Tian, Xiaoqing |
author_sort | Huang, Jinyu |
collection | PubMed |
description | ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)OH characteristics in terms of high sensitivity, excellent selectivity, rapid response/recovery, and low detection limit down to 0.1 ppm. The excellent sensing performance of the sensor with UV activation could be attributed to the photocatalytic oxidation of ethanol on the surface of the ZnO film, the planar film structure with high utilizing efficiency of UV light, high electron mobility, and a good surface/volume ratio of of ZnO film with a relatively rough and porous surface. |
format | Online Article Text |
id | pubmed-5795609 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2017 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-57956092018-02-13 UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film Huang, Jinyu Du, Yu Wang, Quan Zhang, Hao Geng, Youfu Li, Xuejin Tian, Xiaoqing Sensors (Basel) Article ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)OH characteristics in terms of high sensitivity, excellent selectivity, rapid response/recovery, and low detection limit down to 0.1 ppm. The excellent sensing performance of the sensor with UV activation could be attributed to the photocatalytic oxidation of ethanol on the surface of the ZnO film, the planar film structure with high utilizing efficiency of UV light, high electron mobility, and a good surface/volume ratio of of ZnO film with a relatively rough and porous surface. MDPI 2017-12-26 /pmc/articles/PMC5795609/ /pubmed/29278393 http://dx.doi.org/10.3390/s18010050 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Huang, Jinyu Du, Yu Wang, Quan Zhang, Hao Geng, Youfu Li, Xuejin Tian, Xiaoqing UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film |
title | UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film |
title_full | UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film |
title_fullStr | UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film |
title_full_unstemmed | UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film |
title_short | UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film |
title_sort | uv-enhanced ethanol sensing properties of rf magnetron-sputtered zno film |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795609/ https://www.ncbi.nlm.nih.gov/pubmed/29278393 http://dx.doi.org/10.3390/s18010050 |
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