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UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film

ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)O...

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Detalles Bibliográficos
Autores principales: Huang, Jinyu, Du, Yu, Wang, Quan, Zhang, Hao, Geng, Youfu, Li, Xuejin, Tian, Xiaoqing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2017
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795609/
https://www.ncbi.nlm.nih.gov/pubmed/29278393
http://dx.doi.org/10.3390/s18010050
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author Huang, Jinyu
Du, Yu
Wang, Quan
Zhang, Hao
Geng, Youfu
Li, Xuejin
Tian, Xiaoqing
author_facet Huang, Jinyu
Du, Yu
Wang, Quan
Zhang, Hao
Geng, Youfu
Li, Xuejin
Tian, Xiaoqing
author_sort Huang, Jinyu
collection PubMed
description ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)OH characteristics in terms of high sensitivity, excellent selectivity, rapid response/recovery, and low detection limit down to 0.1 ppm. The excellent sensing performance of the sensor with UV activation could be attributed to the photocatalytic oxidation of ethanol on the surface of the ZnO film, the planar film structure with high utilizing efficiency of UV light, high electron mobility, and a good surface/volume ratio of of ZnO film with a relatively rough and porous surface.
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spelling pubmed-57956092018-02-13 UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film Huang, Jinyu Du, Yu Wang, Quan Zhang, Hao Geng, Youfu Li, Xuejin Tian, Xiaoqing Sensors (Basel) Article ZnO film was deposited by the magnetron sputtering method. The thickness of ZnO film is approximately 2 μm. The influence of UV light illumination on C(2)H(5)OH sensing properties of ZnO film was investigated. Gas sensing results revealed that the UV-illuminated ZnO film displays excellent C(2)H(5)OH characteristics in terms of high sensitivity, excellent selectivity, rapid response/recovery, and low detection limit down to 0.1 ppm. The excellent sensing performance of the sensor with UV activation could be attributed to the photocatalytic oxidation of ethanol on the surface of the ZnO film, the planar film structure with high utilizing efficiency of UV light, high electron mobility, and a good surface/volume ratio of of ZnO film with a relatively rough and porous surface. MDPI 2017-12-26 /pmc/articles/PMC5795609/ /pubmed/29278393 http://dx.doi.org/10.3390/s18010050 Text en © 2017 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Huang, Jinyu
Du, Yu
Wang, Quan
Zhang, Hao
Geng, Youfu
Li, Xuejin
Tian, Xiaoqing
UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
title UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
title_full UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
title_fullStr UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
title_full_unstemmed UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
title_short UV-Enhanced Ethanol Sensing Properties of RF Magnetron-Sputtered ZnO Film
title_sort uv-enhanced ethanol sensing properties of rf magnetron-sputtered zno film
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795609/
https://www.ncbi.nlm.nih.gov/pubmed/29278393
http://dx.doi.org/10.3390/s18010050
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