Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor

Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capabilit...

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Detalles Bibliográficos
Autores principales: Hussain, Danish, Wen, Yongbing, Zhang, Hao, Song, Jianmin, Xie, Hui
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795913/
https://www.ncbi.nlm.nih.gov/pubmed/29301265
http://dx.doi.org/10.3390/s18010100

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795913/
https://www.ncbi.nlm.nih.gov/pubmed/29301265
http://dx.doi.org/10.3390/s18010100

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