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Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor
Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capabilit...
Autores principales: | Hussain, Danish, Wen, Yongbing, Zhang, Hao, Song, Jianmin, Xie, Hui |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5795913/ https://www.ncbi.nlm.nih.gov/pubmed/29301265 http://dx.doi.org/10.3390/s18010100 |
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