Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

In this study, the sensing properties of an amorphous indium gallium zinc oxide (a-IGZO) thin film at ozone concentrations from 500 to 5 ppm were investigated. The a-IGZO thin film showed very good reproducibility and stability over three test cycles. The ozone concentration of 60–70 ppb also showed...

Descripción completa

Detalles Bibliográficos
Autores principales: Wu, Chiu-Hsien, Jiang, Guo-Jhen, Chang, Kai-Wei, Deng, Zu-Yin, Li, Yu-Ning, Chen, Kuen-Lin, Jeng, Chien-Chung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5796337/
https://www.ncbi.nlm.nih.gov/pubmed/29315218
http://dx.doi.org/10.3390/s18010163

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5796337/
https://www.ncbi.nlm.nih.gov/pubmed/29315218
http://dx.doi.org/10.3390/s18010163

Ejemplares similares