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Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

In this study, the sensing properties of an amorphous indium gallium zinc oxide (a-IGZO) thin film at ozone concentrations from 500 to 5 ppm were investigated. The a-IGZO thin film showed very good reproducibility and stability over three test cycles. The ozone concentration of 60–70 ppb also showed...

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Detalles Bibliográficos
Autores principales:	Wu, Chiu-Hsien, Jiang, Guo-Jhen, Chang, Kai-Wei, Deng, Zu-Yin, Li, Yu-Ning, Chen, Kuen-Lin, Jeng, Chien-Chung
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2018
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5796337/ https://www.ncbi.nlm.nih.gov/pubmed/29315218 http://dx.doi.org/10.3390/s18010163

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