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High quality self-separated GaN crystal grown on a novel nanoporous template by HVPE
In this study, a novel nanoporous template was obtained by a two-step etching process from MOCVD-GaN/Al(2)O(3) (MGA) with electrochemical etching sequentially followed by chemical wet etching. The twice-etched MOCVD-GaN/Al(2)O(3) (TEMGA) templates were utilized to grow GaN crystals by hydride vapor...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5816597/ https://www.ncbi.nlm.nih.gov/pubmed/29453376 http://dx.doi.org/10.1038/s41598-018-21607-3 |