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The Optimization of Spacer Engineering for Capacitor-Less DRAM Based on the Dual-Gate Tunneling Transistor
The DRAM based on the dual-gate tunneling FET (DGTFET) has the advantages of capacitor-less structure and high retention time. In this paper, the optimization of spacer engineering for DGTFET DRAM is systematically investigated by Silvaco-Atlas tool to further improve its performance, including the...
Autores principales: | Li, Wei, Liu, Hongxia, Wang, Shulong, Chen, Shupeng, Wang, Qianqiong |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer US
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5838025/ https://www.ncbi.nlm.nih.gov/pubmed/29508093 http://dx.doi.org/10.1186/s11671-018-2483-8 |
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