On the insulator-to-metal transition in titanium-implanted silicon

Hyperdoped silicon with deep level impurities has attracted much research interest due to its promising optical and electrical properties. In this work, single crystalline silicon supersaturated with titanium is fabricated by ion implantation followed by both pulsed laser melting and flash lamp anne...

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Detalles Bibliográficos
Autores principales: Liu, Fang, Wang, Mao, Berencén, Yonder, Prucnal, Slawomir, Engler, Martin, Hübner, René, Yuan, Ye, Heller, René, Böttger, Roman, Rebohle, Lars, Skorupa, Wolfgang, Helm, Manfred, Zhou, Shengqiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5841356/
https://www.ncbi.nlm.nih.gov/pubmed/29515174
http://dx.doi.org/10.1038/s41598-018-22503-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5841356/
https://www.ncbi.nlm.nih.gov/pubmed/29515174
http://dx.doi.org/10.1038/s41598-018-22503-6

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