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Influence of Polymer Substrate Damage on the Time Dependent Cracking of SiN(x) Barrier Films
This work is concerned with the long-term behavior of environmentally-assisted subcritical cracking of PECVD SiN(x) barrier films on polyethylene terephthalate (PET) and polyimide (PI) substrates. While environmentally-assisted channel cracking in SiN(x) has been previously demonstrated, with consta...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5852237/ https://www.ncbi.nlm.nih.gov/pubmed/29540713 http://dx.doi.org/10.1038/s41598-018-22105-2 |