Design Optimization and Fabrication of a Novel Structural SOI Piezoresistive Pressure Sensor with High Accuracy

This paper presents a novel structural piezoresistive pressure sensor with four-grooved membrane combined with rood beam to measure low pressure. In this investigation, the design, optimization, fabrication, and measurements of the sensor are involved. By analyzing the stress distribution and deflec...

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Detalles Bibliográficos
Autores principales: Li, Chuang, Cordovilla, Francisco, Jagdheesh, R., Ocaña, José L.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855054/
https://www.ncbi.nlm.nih.gov/pubmed/29393916
http://dx.doi.org/10.3390/s18020439

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855054/
https://www.ncbi.nlm.nih.gov/pubmed/29393916
http://dx.doi.org/10.3390/s18020439

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