Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temper...

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Detalles Bibliográficos
Autores principales: He, Jiangbo, Zhou, Wu, Yu, Huijun, He, Xiaoping, Peng, Peng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855055/
https://www.ncbi.nlm.nih.gov/pubmed/29470398
http://dx.doi.org/10.3390/s18020643

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855055/
https://www.ncbi.nlm.nih.gov/pubmed/29470398
http://dx.doi.org/10.3390/s18020643

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