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Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity
The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temper...
Autores principales: | He, Jiangbo, Zhou, Wu, Yu, Huijun, He, Xiaoping, Peng, Peng |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855055/ https://www.ncbi.nlm.nih.gov/pubmed/29470398 http://dx.doi.org/10.3390/s18020643 |
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