Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light

The sensitivity of silicon nanopillar array for relative humidity (RH) with UV illumination was investigated in this work. The silicon nanopillar array was prepared by nanosphere lithography. Electrical measurements were performed on its sensing performance with and without UV irradiation. It was fo...

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Detalles Bibliográficos
Autores principales: Li, Wei, Ding, Chao, Cai, Yun, Liu, Juyan, Wang, Linlin, Ren, Qingying, Xu, Jie
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855532/
https://www.ncbi.nlm.nih.gov/pubmed/29473917
http://dx.doi.org/10.3390/s18020660

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855532/
https://www.ncbi.nlm.nih.gov/pubmed/29473917
http://dx.doi.org/10.3390/s18020660

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