Dual-Mode Gas Sensor Composed of a Silicon Nanoribbon Field Effect Transistor and a Bulk Acoustic Wave Resonator: A Case Study in Freons

In this paper, we develop a novel dual-mode gas sensor system which comprises a silicon nanoribbon field effect transistor (Si-NR FET) and a film bulk acoustic resonator (FBAR). We investigate their sensing characteristics using polar and nonpolar organic compounds, and demonstrate that polarity has...

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Detalles Bibliográficos
Autores principales: Chang, Ye, Hui, Zhipeng, Wang, Xiayu, Qu, Hemi, Pang, Wei, Duan, Xuexin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855964/
https://www.ncbi.nlm.nih.gov/pubmed/29370109
http://dx.doi.org/10.3390/s18020343

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5855964/
https://www.ncbi.nlm.nih.gov/pubmed/29370109
http://dx.doi.org/10.3390/s18020343

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