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A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates
In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capa...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5856038/ https://www.ncbi.nlm.nih.gov/pubmed/29373546 http://dx.doi.org/10.3390/s18020362 |