A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of precision engineering such as ultra-precision machine tools, coordinate measuring machines (CMMs) and so on, is...

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Detalles Bibliográficos
Autores principales: Shimizu, Yuki, Kataoka, Satoshi, Ishikawa, Tatsuya, Chen, Yuan-Liu, Chen, Xiuguo, Matsukuma, Hiraku, Gao, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5856120/
https://www.ncbi.nlm.nih.gov/pubmed/29385724
http://dx.doi.org/10.3390/s18020398

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5856120/
https://www.ncbi.nlm.nih.gov/pubmed/29385724
http://dx.doi.org/10.3390/s18020398

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