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A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions
In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of precision engineering such as ultra-precision machine tools, coordinate measuring machines (CMMs) and so on, is...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5856120/ https://www.ncbi.nlm.nih.gov/pubmed/29385724 http://dx.doi.org/10.3390/s18020398 |