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Comparative study of sculptured metallic thin films deposited by oblique angle deposition at different temperatures

Metals with a wide range of melting points are deposited by electron beam evaporation under oblique deposition geometry on thermally oxidized Si substrates. During deposition the sample holder is cooled down to 77 K. It is observed that all obliquely deposited metals grow as tilted, high aspect rati...

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Detalles Bibliográficos
Autores principales: Liedtke, Susann, Grüner, Christoph, Gerlach, Jürgen W, Rauschenbach, Bernd
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5870142/
https://www.ncbi.nlm.nih.gov/pubmed/29600156
http://dx.doi.org/10.3762/bjnano.9.89