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Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorpho...

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Detalles Bibliográficos
Autores principales: Chen, Jiawen, Li, Jianhua, Li, Yiyuan, Chen, Yulong, Xu, Lixin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5876599/
https://www.ncbi.nlm.nih.gov/pubmed/29494477
http://dx.doi.org/10.3390/s18030732