Design, Fabrication and Characterization of a MEMS-Based Three-Dimensional Electric Field Sensor with Low Cross-Axis Coupling Interference

One of the major concerns in the development of three-dimensional (3D) electric field sensors (EFSs) is their susceptibility to cross-axis coupling interference. The output signal for each sensing axis of a 3D EFS is often coupled by electric field components from the two other orthogonal sensing ax...

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Detalles Bibliográficos
Autores principales: Ling, Biyun, Peng, Chunrong, Ren, Ren, Chu, Zhaozhi, Zhang, Zhouwei, Lei, Hucheng, Xia, Shanhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2018
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877351/
https://www.ncbi.nlm.nih.gov/pubmed/29543744
http://dx.doi.org/10.3390/s18030870

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC5877351/
https://www.ncbi.nlm.nih.gov/pubmed/29543744
http://dx.doi.org/10.3390/s18030870

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